As Legion indicates, the geth might be willing to give up the quarian homeworld, which isn't of any particular value to them. But there are a few problems with that. Just trading ownership of that one planet won't be enough to ensure a lasting peace.
There are only 17 million Quarians on the migrant fleet. Let’s assume a total population of 20 million if you count everyone on pilgrimage. Now let’s assume that, on a planet, their population doubled every 20 years. It would take more than 100 years for the homeworld population to exceed 1 billion.
Therefore:
In order for the Migrant Fleet to successfully transform itself into a stable, independent, planet-based society in the Mass Effect age, the geth are going to have to cede to the quarians at least the entire quarian home system, and (almost certainly) make further territorial concessions so as the quarians have unfettered access to the relay network.
In the first place, that’s not the case with such a small population. In the second, they only have to cede the habitable portions. The Geth don’t need planets. They live in space stations where they have access to resources in asteroids.
Third, there is no such thing as a permanent guarantee of peace forever and ever, amen. Such a demand can’t be granted by anyone.
The key point in this argument is this:
Think about it, if you were the geth would you allow your most persistent enemy to set up an armed camp in the heart of your territory? Or would you have them disarm first? And just how likely do you think the quarians would be to accept anything like that? And consider that from the quarian's point of view, talk about a siege mentality! If I were a quarian and had to choose between living in the Migrant Fleet or on Rannoch, disarmament or no, under the watchful eye of the geth, I'd choose the former, no question.
A valid view – unless there’s a Reaper invasion going on.
A probability of getting betrayed and wiped out by an old enemy still gives better odds than certain extinction from a new one.