@riverbanks: Aside from the fact that he doesn't actively want to annihilate everyone else and "only" views that outcome as unfortunate but nonetheless acceptable collateral damage: yep.
That is the mark of his character, isn't it? He knows what he's doing is terrible, but he's gonna do it anyway. He doesn't like people who lie and manipulate others, but he lies and manipulates too. He doesn't want to hurt people, as Cole says, but he's hurting a lot of people as he moves. He regrets that his actions will cause bloodshed and destruction, but he's still going forward with his plans. He can even come to respect the Inquisitor (or love her, under the right circumstances), but that's still not enough to stop him. He's full of sorrow and regret about having to destroy this world to bring back the one he misses, but he's still gonna do it anyway.
I actually changed my mind about Solas because of what he says if you choose the option to beg for this world's sake instead of threatening to kill him in the end: you tell him you're gonna prove him this world is worth saving, and he actually wants you to prove him wrong. That's what drove him around for me, from cartoonish Disney villain to an interesting villain with depth and nuance. He's wrong, he's completely wrong and must be stopped at all costs, but even he knows that, and hopes you (or whoever new hero will actually take him down in DA4) are able to. He's absolutely the villain of the story and should not be woobified or romanticized into a tragic misunderstood hero, but damn what an interesting nemesis we got in him.